Your semiconductor specialist
More than 30 years of expertise!
ISO 9001 certified
Contact us :
+33(0) 438 92 03 31
spares@teltec.fr

Very large inventory / World wide deliveries / Urgent deliveries / Competitive prices
Contact us : +33(0) 438 92 03 31 | spares@teltec.fr

SECOND HAND AND REFURBISHED EQUIPEMENTS

THERMAWAVE

THERMA-PROBE

TP500

TP500XP

TP630 

TP630XP

OPTI-PROBE

OP2600 - 2600DUV

OP2690 - 2690DUV

OP3260 - 3260DUV

OP3290 - 3290DUV

OP5220 - 5230 - 5240 - 5241

OP5330 - 5340 - 5341

OP7340 - 7341 

Therma-Probe

The Therma-Probe® is the industry standard for implant dose metrology. With its advances in modulated optical reflectance, the Therma-Probe system provides dose measurements for in-line ion implantation monitoring. The system contributes to higher yield by monitoring for process excursion

These proprietary applications provide for the best implant dose detect ability in the industry. In addition, the tool is enabled for fully automated 100 to 300 mm production use.

Opti-Probe

The Therma-Wave Opti-Probe integrates  separate technologies into one tool to enable stable measurements of all thick and thin films and film stacks in advanced 150 mm - 300 mm fabs. The tool is simple to use and includes an entire suite of pre-developed applications for all fab modules. By combining wavelength-based and angle-based technologies, the Opti-Probe  provides a robust solution for production situations where film thickness and material characteristics vary.