The Therma-Probe® is the industry standard for implant dose metrology. With its advances in modulated optical reflectance, the Therma-Probe system provides dose measurements for in-line ion implantation monitoring. The system contributes to higher yield by monitoring for process excursion
These proprietary applications provide for the best implant dose detect ability in the industry. In addition, the tool is enabled for fully automated 100 to 300 mm production use.